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退火条件对ZnO薄膜结构和光学性能的影响 被引量：1

Influence of Annealing Temperature on Structure and Optical Properties of Zinc Oxide Films
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摘要 采用溶胶-凝胶法在单晶硅Si(100)衬底上制备了ZnO薄膜,研究了退火温度对ZnO结构和光学性能的影响。实验发现,退火可以明显地改善ZnO薄膜的结构和光学性能。随着退火温度的升高,ZnO薄膜的晶粒增大,同时在室温下观察到明显的紫外发光现象,其紫外PL谱峰值变强,并有红移现象。 ZnO films were fabricated by Sol-Gel method on （001） Si substrates. The influence of annealing temperature on structure and optical properties of ZnO films was investigated. Annealing could improve crystallization and optical properties of ZnO films evidently. With the annealing temperature increasing, the grain size became larger and ultraviolet emission was observed at room temperature. While annealing temperature was higher, PL peak was stronger and had a little red shift.
作者 范利宁 袁宁一 李金华
机构地区 江苏工业学院功能材料实验室
出处 《江苏工业学院学报》 2007年第2期4-6,共3页 Journal of Jiangsu Polytechnic University
基金 江苏省自然科学基金项目(BK2006042)
关键词 ZNO薄膜 溶胶-凝胶法 光学性能 退火温度 ZnO films sol-gel method optical properties annealing temperature
分类号 TB43 [一般工业技术] O552.6 [理学—热学与物质分子运动论]
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参考文献8

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同被引文献10

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江苏工业学院学报
2007年 第2期

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