基于AFM的机器人化纳米操作中纳观力的初步研究

A Pilot Study on Nano Forces in AFM-Based Robotic Nanomanipulation

针对基于原子力显微镜(AFM)的机器人化纳米操作,对探针作用下探针—基片—微粒之间纳观力的作用规律进行了初步分析.指出起主要作用的纳观力为范德华力、接触斥力、纳米摩擦力、毛细作用力以及纳米静电力等五种,并初步推导了各种纳观力的表达形式.通过力—距离曲线仿真与实验验证了所进行分析的合理性;该分析有助于进行纳米操作的精确控制.

For robotic nanomanipulation based on an atomic furce microscope （ AFM）, the working principle of interactive nano forces among the probe, substrate and particle is preliminarily analyzed. The decisive nano forces are pointed out to be Van der Waals force, repulsive contact force, nano frictional force, capillary force and nano electrostatic force, and their calculation formulas are also deduced. Simulation and experiments of force-distance curve are performed to verify the, rationality of the analysis, which is helpful for accurate control of nanomanipulation.