摘要
目的研究制备高质量的纳米ZnO薄膜的最佳方案。方法通过反应条件和工艺参数的控制,用PLD法制备纳米氧化锌薄膜,对所制备的纳米氧化锌薄膜进行XRD谱研究,采用原子显微镜观察其形貌并研究氧化锌薄膜的各种光学性质。结果在激光脉冲能量为150 mJ、氧气压为20Pa条件下制备出了高质量的c轴择优取向的纳米氧化锌薄膜。结论制备工艺参数的控制对其性质有着极其重要的影响。
Aim To study the best scheme that can prepare higher quality nano-ZnO films. Methods Through controlling reaction conditions and technology parameter, prepare higher quality nano-ZnO films by using PLD method, study its XRD spectrum, and observe its pattern and the nature of nano-ZnO films throuth microscopes. Results The thin film that is prepared at 20Pa oxygen pressure and 150 mJ pulsed laser energy was highly c-axis oriented. Conclusion Control has an important effect on its quality.
出处
《西北大学学报（自然科学版）》
CAS
CSCD
北大核心
2007年第3期366-370,共5页
Journal of Northwest University（Natural Science Edition）
基金
西安理工大学科研基金资助项目(108-210609)
关键词
纳米氧化锌
制备
光致发光
nanometer ZnO films
preparation
photolum inescence
