静电悬浮式惯性仪表中的微位移检测技术

Displacement detection schemes for electrostatically levitated inertial instruments

静电陀螺仪、空间静电加速度计等基于静电悬浮的惯性仪表在高精度的惯性导航和空间微重力测量领域得到广泛应用。近年来,对基于MEMS工艺的悬浮式微惯性传感器的研究引起了广泛的重视。介绍了静电悬浮式惯性仪表中采用的差动电容式微位移检测电路的原理,分别对静电陀螺、静电加速度计和MEMS微陀螺、微加速度计的电极配置方案和位移检测的接口电路进行了分析,并对不同的位移检测方案进行了比较。

The electrostatic levitation-based inertial instruments such as gyroscopes and space accelerometers have already been utilized in high-precision inertial navigation and micro-gravity measurement applications. Moreover, electrostatically levitated micro-inertial sensors fabricated by MEMS technology have also found many potential applications in recent years. The paper introduced the operating principle of differential-capacitance-based micro-displacement detection in electrostatically levitated inertial instruments, analyzed the electrode configuration and displacement sensing interface circuit in ESG; electrostatic accelerometers and MEMS micro-inertial sensors. Various displacement-detecting schemes were summarized to demonstrate their features and specific applications.