MEMS陀螺仪短时漂移特性实验研究

Short-time drift characteristic of MEMS Gyroscope

针对低精度MEMS陀螺仪适合短时间工作的特点,在不同采样频率下测试了常用MEMS陀螺仪的短时漂移,对比研究并分析讨论了各种被测MEMS陀螺仪的短时漂移特性,发现石英系列MEMS陀螺仪的短时漂移在高频采样时表现出显著的周期性,并说明测试石英MEMS陀螺仪需要高采样频率,应用时需精确标定补偿其周期特性。

Considering that MEMS gyroscope is suitable for short time working, the test experiments on gyroscope short-time drift were carried out under different sampling frequencies, and the experiments results were analyzed. It was found that the drift of quartz MEMS gyroscope had significant periodicity when the sampling frequency was high. It was shown that the test procedure of quartz MEMS gyroscopes should be performed under a high sampling frequency, and the accurate calibrating and compensation for periodic function was necessary in application.