摘要
采用真空蒸发技术，以醋酸锌和氯化铝作为蒸发物质，在加热的玻璃衬底上制备出氧化锌和铝掺杂的氧化锌透明导电薄膜。研究了氢气、空气和真空退火处理对制备薄膜的结构及电学性能的影响。
Un-doped and aluminium-doped zinc oxide films were prepared by evaporation of zinc acetate and aluminium chloride onto heated glass substrate. The structure and electrical properties of the films offected by heat treatment in hydrugen gas, air and vacuum were studied.
出处
《山东电子》
1997年第2期10-11,共2页
Shandong Electronics
