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Mn_(0.1)Ti_(0.9)O_(2-δ)稀磁半导体薄膜的MBE生长及表征 被引量：2

Characterization of Diluted Magnetic Semiconductor Mn_(0.1)Ti_(0.9)O_(2-δ) Thin Film Grown by Molecular Beam Epitaxy
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摘要 采用OPA-MBE方法在SrTiO3(STO)衬底上成功制备了Mn0.1Ti0.9O2-δ(MTO)稀磁半导体薄膜.利用X射线衍射仪、X射线光电子能谱仪、紫外可见光分度计以及直流四探针测试仪研究了薄膜的晶体结构、化学组成、光吸收和电荷输运性质.MTO薄膜具有锐钛矿和金红石的混合相,光吸收带边界发生“红移”,电荷输运性质明显提高,室温环境下电阻率仅为37.5Ω.m. Diluted magnetic semiconductor Mn0.1Ti0.902-δ （MTO） thin film was grown successfully on SrTiO3 （STO） substrate by oxygen plasma assisted molecular beam epitaxy （OPA-MBE）. The crystalline structure,chemistry composition,optical absorption,and electrical conductivity properties of the thin film were characterized by X-ray diffraction （XRD） ,X-ray photoelectron spectrometry （XPS）,ultraviolet and visible spectrophotometry （UV-Vis）, and resistivity measuring instruments with a four-probe array. The MTO thin film has anatase and rutile crystal structures, and the absorption edge is shifted to the lower-energy. The electrical conductivity of the MTO thin film is evidently improved, and the resistivity is only 37. 5Ω· m at room temperature.
作者 夏延秋 吴曙翔 刘雅晶 于晓龙 李树玮
机构地区 中山大学光电材料与技术国家重点实验室
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第7期1058-1062,共5页 半导体学报（英文版）
基金 国家自然科学基金(批准号:50572124) 广州市科技计划资助项目~~
关键词 Mn0.1Ti0.9O2-δ薄膜 稀磁半导体 OPA-MBE X射线光电子能谱 Mn0.1Ti0.90z-δ （MTO） thin film diluted magnetic semiconductor oxygen plasma assisted molecular beam epi-taxy X-ray photoelectron spectra
分类号 O484 [理学—固体物理]
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参考文献22

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共引文献8

同被引文献16

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引证文献2

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Journal of Semiconductors
2007年 第7期

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