高温超导YBa_2Cu_3O_7薄膜的颗粒、杂相生长机制研究

The Growth Mechanism of Particles and Impurities in High Temperature YBCO Thin Films

ＹＢａ２Ｃｕ３Ｏ７（ＹＢＣＯ）高温超导薄膜是重要的超导电子器件应用的材料，它们的质量对器件的运行性能至关重要。薄膜表面的颗粒使表面微波性能变坏，但有些生长在ＹＢＣＯ薄膜基体内部的小颗粒，会使薄膜的临界电流密度升高。我们运用透射电子显微镜（ＴＥＭ），扫描隧道显微镜（ＳＴＭ），原子力显微镜（ＡＦＭ）研究了脉冲激光淀积（ＰＬＤ）和磁控溅射制备的ＹＢＣＯ薄膜的生长机制以及其颗粒、杂相的生长机制。

The high temperature superconducting YBCO thin films is one of the important materials for the application of superconducting microelectronics. The quality of the thin films is very crucial, large particles grown on the surface of the film will deteriorate the property of the surface microwave resistance. On the other hand, small particles embedded within the film matrix can increase the critical current density of the film. We used TEM, STM and AFM to study the growth mechanism of the YBCO thin films and its impurity particles synthesized by PLD and magnetron sputtering. Some new interesting results have been obtained.