液膜法制备STM探针研究

Preparation of STM Tips Using Lamella Drop-off Technique

本文采用液膜代替传统的电解质溶液,用电化学腐蚀法制备了STM用W探针,细致研究了电压、液膜中电解质浓度和补充滴加电解质的时间间隔的单因素实验和正交实验对探针制备成功率的影响。采用该法得到的探针针尖表面光滑,显示出极好的对称性,在较佳的条件下,曲率半径最小达到48 nm,超过了进口的商业化STM探针的水平,可以进行实际应用。

In this paper, tungsten TM tips were prepared by electrochemical corrosion method using lamella drop-off technique instead of conventional electrolyte solution. Single-factor experiments and orthogonal experiments of the influences of voltage, concentration of electrolyte in the lamella and the electrolyte-refill interval on the rate getting successful STM tips were studied in details. The tips obtained using such method show smooth surface with good symmetrical characteristic, the radius of curvature of the best-prepared tip under a relatively good condition is 48 nm, which exceeds the imported commercial production and could be used for practical application.