刀口扫描聚焦光斑法激光束漂移测量

Measurement of Laser Beam Drift Based on the Method of Knife-edge Scanning Focusing Spot

高精确度直线度测量多采用激光方法,但激光束随机漂移影响其稳定性,极大地限制了直线度测量精确度.本文采用刀口法高精确度高分辨率地测出激光束漂移值,以进行补偿修正.给出测量原理、设计出测量系统.刀口位移分辨率高于0.05μm,激光束漂移的最大值为0.05μm左右,两路间漂移的不一致性最大为0.2μm左右.

Although laser is generally applied to the high precision linear measurement, random drift of the laser beam can influence the stability of measurement and greatly limit the precision of linear measurement. A novel method was proposed which applies high precision and resolution to detect the laser drift value, in order to compensate and modify. The theory of measurement and the design of measure system are explained in detail. The resolution of displacement is higher than 0. 05μm, the max value of the laser beam drift is about 0. 05μm, the greatest disaccord of the two beams is about 0. 2μm.