平面螺旋电感耦合微波等离子体源的建模分析

Modeling of planar spiral inductively-coupled microwave plasma source

介绍了一种小型化的2.45GHz小功率平面螺旋电感耦合微波等离子体源的建模方法。根据等效电路,推导出平面螺旋电感线圈的品质因数,并进行数值分析。研究表明:无载品质因数随结构、尺寸和频率等的变化而变化,并在谐振频率附近达到最大值。这为小功率电感耦合微波等离子体源的优化设计提供了理论依据。

A modeling of low power planar spiral inductively-coupled microwave plasma source at 2.45GHz is presented in this paper. The quality factor of planar spiral coil was deduced with equivalent circuits and analyzed numerically. The results indicate that the unloaded quality factor changes with configuration, size and frequency, and reaches maximum near the resonant frequency. This may be a theoretical guidance for optimizing low power planar spiral inductively coupled microwave plasma source.