增进数据准确度的散射辐射融合测量方法

Fusion of scattering and radiometric measurement for improving data accuracy

分析了非线性响应特性和发射功率波动对散射测量的联合效应,以及单独的散射测量在这种联合效应作用下产生误差的原因。推导建立了这种联合效应的定标方法的数学模型。利用散射辐射组合系统,构建了一种散射辐射融合测量方法用于实现这一定标方法。数值模拟了该融合测量方法相对于单独的散射测量方法在数据准确度、测量动态范围等性能上的改进效果。

The joint effect of nonlinear response characteristics and transmitting power fluctuation on scattering measurement is analyzed. This joint effect may produce rather large error for scattering measurement alone, and the reason is discussed in detail. To eliminate the error, a mathematic model of calibration is established. Then, a fusion method of scattering and radiometric measurement is developed based on a scatterometer and radiometer combined system. Simulation result reveals improvement in data accuracy and expansion of measurement range by the fusion method.