摘要
三维原子探针(3DAP)是一种定量显微分析仪器,通过对不同元素的原子逐个进行分析,可绘出金属样品中不同元素的原子在纳米空间中的分布图形.从分析逐个原子来了解物质微区化学成分的不均匀性,3DAP是一种不可替代的分析方法.本文介绍了3DAP的工作原理及样品制备,举例说明了3DAP分析技术的应用.
The three -dimensional atom probe (3DAP) is a quantitative micro -analytical instrument, which provides three - dimension maps of the distribution of different element atoms in metallic specimens by chemically analyzing the atoms one -by -one. No method can take the place of 3DAP to find out the chemical inhomogeneities in nanometer scale of the specimens by the analysis of individual atoms. This review presents the working principal and sample preparation of 3DAP. Unique features of the 3DAP are demonstrated by describing the applications of 3DAP.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2007年第3期405-408,共4页
Materials Science and Technology
基金
上海市纳米专项基金资助项目(0552nm049)
关键词
三维原子探针
成分分析
界面偏聚
弥散相析出
纳米晶材料
three- dimensional atom probe
composition analysis
interface segregation
dispersion phase precipitation
nanocrystalline materials