摘要
利用原子力显微镜检测ITO薄膜的微观表面形貌以及微观区域电性能,研究氧等离子体处理对ITO薄膜的表面形貌及导电性能的影响,从微观上探讨氧等离子体处理对ITO薄膜的影响.经过氧等离子体处理,ITO薄膜的平均粗糙度从4.6 nm减小到2.5 nm,薄膜的平整度得到提高;但氧等离子体处理之后,ITO薄膜的导电性能大大下降,原因在于ITO薄膜表面被进一步氧化使得ITO薄膜表面的氧空位减少.上述结果从微观上解释了氧等离子体处理能够改善有机发光二极管光电性能的原因.
From microcosimic point, the microcosmic morphology and electrical properties of indiumtin-oxide films was investigated with atomic force microscopy to explore the oxygen plasma treatment behaviour. The research results show that the average surface roughness of ITO film decreased from 4.6 nm to 2.5 nm and its conductance decreased greatly after oxygen plasma treatment, which originates from the decrease of oxygen vacancies caused by the further oxidization of indium-tin-oxide. These results explain why the oxygen plasma treatment can improve the performance of organic light-emitting diode.
出处
《华中科技大学学报(自然科学版)》
EI
CAS
CSCD
北大核心
2007年第7期42-44,共3页
Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金
华中科技大学博士后科学基金资助项目(0101181220)