氧化锌透明导电膜的光电性能研究

Electrical and optical properties of transparency conductive ZnO film

采用磁控溅射法在载玻片上制备出Al3+掺杂型ZnO透明导电薄膜.对不同厚度薄膜的光电性能进行了研究.结果表明,所制备的薄膜随着厚度的增加,透过率略有下降;ZnO薄膜在可见光区的吸光度很小,对可见光几乎不吸收.

In this paper, Al^3＋ doped transparency conductive ZnOfilm was prepared on slide successfully by magnetron sputtering method. The film was analyzed by X - ray diffraction （XRD） spectroscopy, the electrical and optical properties and the effect of the prepared time on the film properties were also investigated. Our results show that with the increase of the thickness of ZnO film, the diffraction peak along （002） was enhanced gradually, the preferred orientation was more obvious; the transmissivity was slightly decreased; the ZnO film had a very small absorbance in visible region, it was almost non- absorbent for visible light.