摘要
简要介绍了几种对纳米谐振梁的能量耗散有显著影响的阻尼机制,以及相关的研究结果。随后,给出了与纳米梁相关的几种振动理论,并分别用它们对振动过程作数值模拟。根据Langmuir单层吸附理论和统计热力学原理,着重研究气体分子在谐振梁表面吸附、解吸附的动态过程中所损耗的能量,然后从品质因数Q的定义出发,研究了吸附解吸附过程对纳机电谐振梁品质因数的影响。结果表明Q值随压强的增大而减小,且与梁的尺寸直接相关。
This dissertation firstly gives a brief introduction to several kinds of damping mechanisms,which have significant effects on energy loss of nanomechanical beam resonators,as well as the research results about them. Then,according to different vibration theories,numerical simulation of the oscillation course can be made respectively. Still,using the theory of Langmuir＇s isotherm and statistical thermodynamics, the energy loss due to adsorption-desorption dynamic process between gas molecule and the beam surface can be analyzed. The influence to quality factor is studied based on its definition.The results show that Q decreases with air pressure increasing,and that Q has a direct relationship with beam geometry.
出处
《机械工程与自动化》
2007年第4期180-182,共3页
Mechanical Engineering & Automation
