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水热法制备薄膜材料技术研究进展 被引量:5

Development and Study of Thin Films Derived by Hydrothermal Technique
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摘要 水热法制备薄膜是近年来发展起来的一种很有潜力的液相制膜技术,在制备压电、铁电和氧化物薄膜等领域内的研究很活跃。笔者介绍了水热法制备薄膜技术的发展、原理、特点以及在材料研究中的应用和发展前景等,综述了相关的研究成果。 Hydrothermal method is an attractive technique to prepare thin films in liquid phase developed in recent yerars, and was used in preparing piezo electric, ferro electric and oxide films. The hydrothermal technique for preparing thin films is introduced, its principle, feather and the relative results are reviewed in this paper.
出处 《陶瓷》 CAS 2007年第7期21-24,共4页 Ceramics
关键词 水热法 薄膜 综述 Hydrothermal method Thin films Summary
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