压电谐振力传感器零位不稳定性的机理和试验

Mechanism and experiment research of zero instability of quartz resonator force sensor

介绍了一种研究石英谐振器力频特性的新方法,利用此方法对平面型和透镜型石英谐振器进行了对比分析,并结合这2种谐振器性能的对比分析试验,得出石英谐振器的电极质量敏感性是引起谐振器零位不稳定和频率短期不稳定的一个主要原因,理论和试验一致表明:通过改善石英谐振器的形状可使这种不稳定性降到原来的1%。

A new method of the force-frequency characters of quartz resonators is introduced,and plane-resonator and lentoid resonator is comporied and analyaed by using this method. Through experiment of two kinds of resonators , the result demonstrates the main reason of zero shift is caused by the mass sensitivity of electrode of quartz resonator. The theory and experiment both indicates resonator instability will decrease to 1% by changing the shape of resonator.