利用脉冲准分子激光在ZnS上沉积类金刚石薄膜

Pulsed Excimer Laser Deposited Diamond Like Carbon Film on ZnS with Wide-Spectral Transmission

利用氟化氪（KrF）脉冲准分子激光烧蚀沉积（PLD）技术，通过对激光等离子体的粒子成分以及空间分布的诊断，实现了等离子体成分的选择性沉积。在不降低光谱范围和透过率指标的前提下，解决了类金刚石（DLC）薄膜和硫化锌（ZnS）基底的牢固结合问题；通过改进基底平台的扫描方式，在激光烧蚀沉积工艺中沉积了φ80 mm的大面积均匀类金刚石薄膜。制备的类金刚石／ZnS镀膜样品，光谱范围为0．53～12μm，其中1．3～11μm波段透过率在70％以上，膜层均匀性优于95％，可耐受环境湿度95％～100％，工作温度-45～85℃，附着力达到国军标要求。研究表明，利用类金刚石薄膜可以明显提高ZnS材料的耐冲击、耐高温、耐辐射和抗沙粒、盐、雾和尘埃的磨损侵蚀等能力。

By KrF pulsed excimer laser deposition （PLD）, the high quality diamond like carbon （DLC） films have been deposited on ZnS substrate to improve its environment reliability. The plasma excited by the laser is also analyzed. And the helpful particles in plasma are filtered and deposited. The adhesion strength of DLC film with ZnS substrates was improved without narrowing the spectral range and decreasing the transmission. The uniformity of films is improved to 95 % in φ80 mm area by off-axis rotating-substrate method. The spectral range of DLC/ZnS sample is 0.53 - 12 μm, especially the transmission is higher than 70% in the spectral range of 1.3 - 11 μm, moisture-resistance is 95 % -100%, and working temperature is -45-85 ℃. The adhesion strength has achieved requirement of ＂General specification for optical coatings＂ （GJB2485-95）. The research shows that the environment reliability of ZnS has been improved obviously by depositing DLC film.