摘要
本文分析了电容型湿度传感器的电极和感湿膜的几何形状,设置感湿膜单元结构为圆柱体或者瓶径体等形状,增大接触面积以减少响应时间,整体感湿膜单元排列成圆环形阵列,上电极也采用圆环形阵列排列,覆盖在感湿单元阵列上方。最后对设计的传感器灵敏度,响应时间等性能进行了分析,得出了有益的结论。
The improved capacity humidity sensor based on polyimide is described here, including the electrode＇s design and the geometry of the film. Cylindrical body matrix is applied here to increase the touching area and decrease the measurement error. Performances of the capacity sensor are depicted and there is great consistency between the simulating curves and the theoretics ,which explains the feasible of the design.
出处
《传感器世界》
2007年第7期30-33,共4页
Sensor World
关键词
聚酰亚胺
电容湿敏元件
圆柱体
圆电极
阵列
polyimide
capacitive humidity sensor
cylindrical body
rounded electrode
matrix
