软X射线---真空紫外大电流空阴极光源的研究

Studies on High current Hollow Cathode Source in Soft X Ray and VUV

描述了最近研制成功的用于软Ｘ射线－真空紫外光谱辐射传递标准光源的大电流空阴极光源。它由两个阳极、一个阴极和一个两级差分泵单元组成，工作电流２Ａ，工作气体为氩和氦，气压１０Ｐａ～１００Ｐａ。能在１３ｎｍ～２００ｎｍ间产生ＡｒⅠ、ＡｒⅡ、ＨｅⅠ、ＨｅⅡ、ＡｌⅡ、ＡｌⅢ和ＡｌⅣ谱线。光源辐射稳定性优于±１％，重复性优于±５％。

This paper describes the newly developed high current hollow cathode source as a soft X ray and vacuum ultraviolet spectral radiation transfer standard source.It consists of two anodes,a cathode and a two stage differetial pumping unit operated at a constant current of 2A with helium or argon as buffer gas at pressures 10 Pa-100 Pa.Several spectral lines of ArⅠ,ArⅡ,HeⅠ,HeⅡ,AlⅡ,AlⅢ and AlⅣ appear at spectral range 13 nm-200 nm.The spectral radiance stability is better than ±1% and the reproducibility is better than ±5%.