蓝光发射和红光发射多孔硅的XPS分析

XPS INVESTIGATION OF BLUE AND RED EMITTING POROUS SILICON

绿色发光多孔硅在空气中经两种不同的氧化处理分别得到红色发光和蓝色发光．Ｘ射线光电子能谱分析显示红色发光多孔硅中含有一定比例的Ｓｉ、ＳｉＯｘ（ｘ＝１～２）以及少量的氟化物；蓝色发光多孔硅的主要成份是ＳｉＯ２及少量的氟化物．红处透射谱显示蓝光发射多孔硅几乎只存在Ｓｉ－Ｏ－Ｓｉ峰，而红光发射多孔硅除主要有Ｓｉ－Ｏ－Ｓｉ峰外，还有明显的ＳｉＨｘ峰．

Red and blue emitting porous silicon (PS) are obtained respectively through two kinds of air oxidization on the green luminescent PS. XPS investigation shows that the composition of red emitting PS are sillicon, SiO x ( x =1～2) and some little fluoride and the blue emitting PS is mainly containing SiO 2 and a little fluoride. IR transmition spectra show that the blue emitting PS almost only exists Si-O-Si peaks, but the red emitting PS not only mainly has Si-O-Si peaks and also has several obvious peaks of SiH x . It is suggested that the blue emission of PS comes from some defect centers in SiO 2.