MEMS构件三维视觉测量中弱透视视觉空间畸变研究

Research on 3D weak perspective visual space distortion in 3D micro visual measurement for MEMS component

微分析系统的核心元件——微流控芯片的制造常采用热压法或模塑法,所需的单晶硅阳模则常用湿法刻蚀加工.为了测量硅阳模的三维外型,结合微测量的特点并基于旋转体视测量原理提出一种新的显微测量方法,开发出一种新的旋转体视显微检测系统(Rotational-Stereo based Micro Measurement System,RSMMS).根据旋转体视显微检测成像几何导出RSMMS中弱透视视觉模型,基于微光学视觉系统中的成像畸变探讨在MEMS微制造过程中光学视觉监控的三维空间畸变,分析了三维等畸变面随畸变因子的变化.仿真结果描述了视觉空间畸变的通常规律并为实际畸变的产生和校正提供了理论依据,同时为光学检测或监控过程提供了视觉畸变的理论分析基础.

There are a few of researches focus on the 3-D optical micro-visual-measuring systems at present. A novel rotational-stereo-based micro measurement system （RSMMS） is developed for 3-D measurement of silicon-mold used for reproduction of polymer microfluid chips. Related measuring technique based on rotational stereo is proposed. The weak perspective vision model based on the imaging geometry of RSMMS is introduced. Then visual space distortion in a micro measurement system based on rotational stereo in MEMS is researched. The variation of 3d isodistortion surface depending on the distortion factor is analyzed. The simulation result describes a general rule of 3-D visual space distortion in micro visual space and provides a theoretical evidence for the generation and rectification of actual distortion in visual space. It also provides the theory foundation for visual distortion in the optical detecting and monitoring process.