硅在HF溶液中阳极溶解的研究

A STUDY OF ANODIC DISSOLUTION OF SILICON IN HF SOLUTIONS

硅在ＨＦ溶液中阳极溶解的研究尹峰李学萍肖绪瑞（中国科学院感光化学研究所，光电化学中心，北京１００１０１）关键词多孔硅，电流电压特性，电容电压特性Ｕｈｌｉｒ及Ｔｕｒｎｅｒ早在５０年代就已发现［１，２］，硅在ＨＦ溶液中阳极极化时，阳极电流大于某...

he currentpotential(IV)and capacitancepotential(CV)characterizations of p+, p-, n+, and n- silicon during the anodic dissolution in HF solutions were studied. There is a strong dependence of the silicon doping type and concentration on the anodic dissolution process of silicon in HF solutions. The rate of dissolution of silicon in HF solutions decreased in the order of p+>p->n+>n-.