由TiOSO_4水解-沉淀制备TiO_2薄膜

PREPARATION OF TiO 2 THIN FILMS FROM TiOSO 4 BY HYDROLYSISPRECIPITATION METHOD

通过控制ＴｉＯＳＯ４的水解沉淀反应条件，可控制基片上膜层粒子大小及其附着力。适量尿素加入可加快均匀成膜速度。根据ＳＥＭ断面观察与重量法相比较，表征了膜厚。适当反应条件下，反应１ｈ，干燥煅烧制得的膜厚为０．２μｍ以上；四次重复反应煅烧，获得的膜厚达０．８μｍ以上。６００～１０００℃煅烧０．５ｈ的薄膜为锐钛矿金红石晶相。膜层结构均匀、较致密，附着力及耐酸碱性均较好。

The size and adhesion of film particles on the substrate can be controlled by variation of reaction conditions.Appropriate amount of urea added can accelerate the formation of film.The film thickness can be obtained by comparison of the measured results of SEM with the weight method results.The thickness of TiO 2 films prepared under improved condition for 1h (1 cycle) is over 0.2μm while that obtained in 4 cycles is over 0.8μm.After calcining at 600～1000℃ for 0.5h,the film can be crystallzed into anatase rutile phase.The structure of the film layer is homogeneous and its adhesion and corrosion resistance are improved.