氮化铝陶瓷的微波烧结研究

MICROWAVE SINTERING OF AlN CERAMICS

利用ＴＥ１０３单模腔微波烧结系统对ＳＨＳ制备的ＡｌＮ粉（添加３％（ｍａｓ）Ｙ２Ｏ３）的加热烧结特征，烧结样品的显微结构进行了研究。通过适当的保温措施和烧结工艺实现了ＡｌＮ陶瓷的微波快速烧结。实验发现在相对较低的测量温度（１６００℃）保温４ｍｉｎ，样品可达到９８．７％的理论密度，ＳＥＭ和ＴＥＭ分析表明，试样内部晶粒细小。

Microwave sintering behavior of SHS prepared AlN powders is presented in the paper.AlN samples with 3% Y 2O 3 as additives can be rapidly sintered to 98 7% TD at 1600℃ by proper packing powder and sintering method in a single mode cavity operating at 2 45 GHz within 5～7 minutes.The results show that sintered samples have high density,relatively finer grain size and uniform microstructure.