摘要
针对典型的50μm×50μm双层微桥结构的微测辐射热计单元的设计,分析了其红外吸收性能、热性能、力学支撑性能及相互间的折衷关系,指出微桥桥面的夹层结构的各层膜厚选取和桥腿宽度的选取是兼顾红外吸收和热、力性能的关键因素.以Si3N4/VOx/Si3N4膜系为例对微桥进行了优化设计,获得了理论上最佳的夹层结构膜厚和桥腿宽度,得到时间常数20ms和8-14μm波段有80%以上红外吸收率.
The design of typical 50 μm× 50 μm microbolometer was described. The infrared absorption, thermal performance and mechanic properties of pixel and the eclectic relation among those were analyzed. Then it came out the conclusion that the thickness of sandwich films and the width of the legs were key factors which affected the microbolometer＇s performance a lot. The Si3N4/VOx/Si3N4 films was analyzed as an example to optimize the microbolometer, and the best thickness of sandwich films and the width of the legs were reported at last. It also gained the thermal time constant of 20 ms and 80% above infrared absorptivity in 8 micrometer to 14 micrometer spectral range.
出处
《电子器件》
CAS
2007年第4期1171-1174,共4页
Chinese Journal of Electron Devices
关键词
微测辐射热计
优化设计
红外吸收率
热性能
力学支撑性能
microbolometer
optimized design
infrared absorptivity
thermal performance
mechanic properties
