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MEMS高精度电容读出电路的单芯片集成研究 被引量：7

Study on MEMS Precision Capacitive Readout Circuits Design
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摘要 MEMS电容式传感器的迅速发展为后续集成化读出电路的设计提出了巨大挑战.系统地分析了制约微传感器高精度电容读出电路设计的主要因素,回顾了目前主要的几种读出电路结构,阐述了这些电路的基本原理,并对影响电路分辨率的主要设计参数进行了分析和对比,最后探讨了电容式读出电路设计的发展趋势. The rapid development of capacitive MEMS sensors poses a big challenge for high-precision integrated readout circuit design. Some key design limitations are discussed and a review of capacitive readout front-end circuits for MEMS sensors is presented. The primary design parameters and their trade-offs affecting the resolution are also studied, with a view to applying to all types of the capacitive MEMS sensor interface. Finally, the research trend in capacitive readout circuit design area is summarized.
作者 尹韬 杨海钢
机构地区 中国科学院电子学研究所传感技术国家重点实验室北方基地
出处 《电子器件》 CAS 2007年第4期1188-1193,共6页 Chinese Journal of Electron Devices
基金 国家自然科学基金资助重点项目(90307014)
关键词 电容读出电路 MEMS电容传感器 电容分辨率 CMOS capacitive readout circuit MEMS capacitive sensor capacitive resolution CMOS
分类号 TN43 [电子电信—微电子学与固体电子学]
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参考文献23

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二级参考文献18

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共引文献16

同被引文献48

引证文献7

二级引证文献25

电子器件
2007年 第4期

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