机械零件三维表面形貌测量与评定的研究

Research on three-dimensional surface topography measurement and characterization of mechanical component

介绍了机械零件三维表面形貌的测量与评定,分析了激光干涉式位移传感器的光学原理和干涉条纹信号的细分方法。激光干涉式位移传感器的精度达到了5nm左右。另外,带计量系统的二维工作台也是整个测量系统的关键部分。因为采用了光栅尺作为二维工作台的计量系统,所以在表面形貌的测量过程中二维工作台在X和Y两个水平方向上都能获得精确的定位。

The three-dimensional surface topography measurement and characterization of mechonical component is presented. The optical principle of the displacement sensor based on laser interference principle and the subdivision method of interference signal are analyzed. The resolution of the displacement sensor based on laser interference principle is about 5nm. The two-dimensional platform with metrology system is also the key component of the measurement system. By the metrology system, the precision positioning in X-Y direction con be obtained during the surface topography measurement.