摘要
介绍了一种用于离子注入机的380kV直流高压电源的电路原理及实现方法。基于高压电源在电压变得越来越高时会由于电场分布不均匀等问题容易导致电源自身的放电打火等问题,提出了一种更为优化的高压倍压方案。
A mathod to realize 380kV high voltage of the ion implanter＇s DC high voltage power is proposed. Considering the electric discharge is easy to happen beause the electric field intensity isn＇t unifoim when the voltage of high voltage power supply bencome higher and higher, an optimization design for the high voltage circuit is presented.
出处
《电源技术应用》
2007年第8期13-16,共4页
Power Supply Technologles and Applications
关键词
高压
离子加速
对称倍压
均压环
high voltage
ion accelerate
double voltage
counterbalancing ring
