射频辉光放电发射光谱法测定不锈钢成分的研究

Study on determination of components in stainless steel by radio frequency glow discharge optical emission spectrometry

研究了射频辉光放电发射光谱法(rf-GD-OES)测定不锈钢成分C,Si,Mn,P,S,Cr,Ni,Cu,Co,Al。考察了射频功率、载气气压、预溅射时间等仪器参数对不锈钢元素谱线发射强度及相对强度稳定性的影响和直流自偏压与射频功率和载气气压的关系。以此为基础,优化后的最佳分析条件为:射频功率90 W、载气气压300 Pa、预溅射时间100 s、积分时间20 s。方法用于测定不锈钢标准样品,测定值与认定值相符,精密度良好。

A radio frequency glow discharge optical emission spectrometry （rf-GD-OES） for determining C,Si,Mn, P, S, Cr, Ni, Cu, Co, Al in stainless steel was established. The influence of radio frequency power, RF pressure and presputter time on the emission intensity and relative intensity stability of elements was examined, and the variation of direct current bias voltage with RF power and pressure was discussed. Based on the experimental results, optimized discharge parameters were as follows：radio frequency power of 90 W,vacuum of 300 Pa, presputter time of 100 s,integrate time of 20 s. The method has been applied to the determination of components in standard steel samples,the results are consistent with the certified values.