摘要
超声换能器是在微电子制造超声键合工艺中的一个重要部件,了解超声换能器的振动模态是非常有必要的。用有限元分析软件ANSYS仿真,得到换能系统的多种振动模态,进而得出其工作频率和主模态。
The ultrasonic transducer plays an important role in ultrasonic wire bonding technics, so it is important to realize the vibration mode of the ultrasonic transducer, through managing ANSYS simulation the vibration mode of transducer system is obtained, and analyzed the effect of transducer when the pre-tightenning force is considered.
出处
《科学技术与工程》
2007年第16期4183-4185,共3页
Science Technology and Engineering
