曲面表面粗糙度、波度及形状误差综合测量与分析的研究

Study on Integrated Measurement for Curved Surface Roughness, Waveness and Form Error

介绍一种能对曲面表面粗糙度、波度和形状误差实施综合测量、分析与评定的测量系统。采用高精度、宽动态的新型轮廓仅传感器，运用频谱分析、快速付立叶变换、多项式拟会等方法实现信号的分离和误差评定。实验证明，系统性能可靠。

A new integrated measuring system for curved surface roughness.waviness and form error is introdueed. In the system, a new sensor with high sensitivity and wide dynamic range is adopted to obtain the information of surface profile. Spectrum analysis,Fasl Fourior Transformation, and polynonhal fitting techniqus are applied to seperate signals and evaluate errors.