摘要
分析研究ＣＶＤ方法制备的多晶金刚石薄膜的压阻效应，结果表明光照对金刚石膜的压阻效应有显著的影响。
The reports on what is the study of piezoresistive effect in the polycrystalline diamond films produced by chemical vapour deposition (CVD) . The experimental results showed that the light illumination has a significant influence on the piezoresistive effect of the diamond films. The results obtained are also discussed briefly.
出处
《甘肃科学学报》
1997年第1期1-4,共4页
Journal of Gansu Sciences
关键词
金刚石
薄膜
压阻效应
光照
CVD
diamond films, illumination, piezoresistive effect
