CrN镀层的微粒磨损性能及其切削行为研究

Micro-abraisive and Cutting Behavior of CrN Coatings

在TeerUDP 550型闭合场非平衡磁控溅射离子镀设备上制备CrN镀层,以球-盘方法测定的比磨损率和微粒磨损法测定的微粒磨损率评价CrN镀层的耐磨性能,采用高速钢镀层钻头的钻孔数评价镀层的切削性能.结果表明,CrN镀层的微粒磨损率对氮流量(用光谱发射因子OEM值控制)的变化很敏感,而比磨损率却不能反映这种由于氮流量变化带来的镀层结构和性能的变化.在不同偏压条件下所制备的镀层微粒磨损率变化不明显.当微粒磨损率低于某一值时,CrN镀层的钻孔寿命明显提高,而比磨损率则无此规律.

CrN coatings with different composition were deposited using a close field unbalanced magnetron sputter ion plating system. Wear of CrN hard coatings was investigated by pin-on-disc tester and micro-abrasion tester. Generally the micro-abrasive wear rate of the CrN coatings was governed by OEM rather than by the bias. Specific wear rate from pin-on-disc test of coatings deposited under different N2 flow which was controlled by opitical emossion monitor was not reflected by the changes of wear resisitance due to different structure and properties. Hole drilling test indicated that the number of holes increased significantly when the micro-abrasive wear rate was less than a critical value, while the specific wear rate changed little.