钛合金表面掺金属类金刚石薄膜的摩擦磨损性能研究

Study on Friction and Wear Performance of Mental Doped Diamond-like Carbon Film on Titanium Alloy Surface

采用阳极层流型矩形气体离子源结合非平衡磁控溅射法在钛合金基体表面制备掺金属类金刚石(Me-DLC)薄膜,通过X射线光电子能谱仪、俄歇微探针、表面形貌仪及扫描电子显微镜等对薄膜结构进行表征,用SRV型摩擦磨损试验机评价其摩擦磨损性能.结果表明,类金刚石薄膜可以提高钛合金基体的承载能力和硬度,对基体材料起到有效的耐磨减摩作用,掺钨类金刚石薄膜的硬度及膜/基结合强度较高,具有良好的耐磨减摩性能,且在膜层承载能力范围内,载荷越高,DLC梯度薄膜的摩擦系数越小.

Metal doped diamond-like carbon （Me-DLC） films were synthesized successfully on Ti6A14V alloy surface by combing rectangular gas ion source and unbalanced maguetron sputtering deposition technology. Transition layer was deposited by sputtering titanium target, then methane was ionized into C ion by rectangular gas ion source and transformed into diamond-like carbon on the substrate. At the same time the metal was doped by sputtering metal target. By this means, titanium doped diamond-like carbon （Ti-DLC） films or tungsten doped diamond-like carbon （W-DLC） films were also deposited. XPS, Auger, Microhardness tester, scratch tester were employed to characterize the structure and the component of the films. Optimal-SRV friction and wear tester was used to study the tribological properties of the films. The test sample of 16Ni3CrMo steel was used as sliding pairs. The stroke distance was 0.25 mm, the frequency was 150 Hz, the load was 50 -600 N, oil was used as lubricant, tests conducted at room temperature. Coefficient of friction value was monitored continuously during the experiment. Talysurf 5P-120 surface profilometer was used to test the depth of the wear trace. The surface morphology was analyzed by JSM5910 TEM. Wear resistance and antifriction of the substrates were improved efficiently by DLC films. WDLC films had larger hardness and adhesion than Ti-DLC films. So W-DLC films has excellent properties such as high wear-resistance, low coefficient of friction, and it is suitable for surface modification of wear parts.