红外探测单片集成与混合集成的研制

Research on Infrared Detecting Monolithic Integration and Hybrid Integration

对用于ＨｇＣｄＴｅ红外探测器的单片集成与混合集成技术进行了研究．研制的低噪声多路前置放大器混合集成模块的等效输入噪声电压＜１．５ｎＶ·Ｈｚ－１／２，性能稳定可靠，已用于红外工程系统中．

The monolithic integration and hybrid integration technology used for HgCdTe infrared detector is researched. A low noise multi preamplifier hybrid integrated module is designed and fabricated. The equivalent input noise voltage of this module is less than 1.5 nV·Hz -1/2 . The results show that the performance of the module which has been applied to the infrared engineering system is very stable and reliable.