摘要
为了对微米尺度物体进行操作,利用显微镜和三维位移台制作了一种微操作器.该微操作器是一种用两根单根碳纤维为两臂的微镊,使用静电力驱动,能实现对30~200μm尺度的物体的夹持.通过闭合实验、夹持实验及微镊闭合过程的理论分析,证明该方法对设备要求低、成本低.
For the purpose of manipulating the objects in the scale of micron, a micro-manipulation instrument was made by using microscope and 3D positioning stage. This micromanipulator is a two-finger micro-tweezers made of two monofilament carbon fibers and driven by electrostatic force. The tweezers can grasp and manipulate micro objects whose size ranges from 30 μm to almost 200 μm stably. The fabrication of the micro-tweezers, the closure experiments, the manipulation experiments and the theory of the closure process are the main parts. This method is cheaper and easier to achieve with simple equipment.
基金
国家自然科学基金重点项目(50335050)资助
关键词
微镊
微操作
单根碳纤维
micro-tweezers
micro-manipulate
monofilament carbon fiber