摘要
紫外激光的波长短,能量聚集集中,分辨率高,特别是具有"冷加工"的特性,能直接破坏连接物质的化学键,而不产生对外围的加热,因此成为加工脆弱物质的理想工具,并能对多种材料进行打孔、切割、烧蚀,在微加工领域中具有广泛的应用。简要介绍了几种紫外激光器的原理特点及其发展现状,并讨论了它在激光加工中的应用。
The advantages of ultraviolet （UV） laser include short wavelength, concentrated energy, high resolution, especially its ＂cold processing＂ properties. The UV laser can destroy the chemical bond of matter directly but not give rise to external heating, and become an ideal tool for processing fragile material. It is able to carry out drilling, cutting and ablating on various materials, and it has a wide application in the field of micro-machining. The fundamental principle, main characteristics and development of several UV lasers are introduced, and the application of UV laser in laser processinq are also analyzed.
出处
《激光与光电子学进展》
CSCD
北大核心
2007年第8期52-56,共5页
Laser & Optoelectronics Progress
关键词
紫外激光器
激光加工
微加工
ultraviolet laser
laser processing
micro-machining
