摘要
从磷酸盐激光玻璃的成分和结构出发,分析了其化学机械抛光(CMP)机制.通过实验验证了磷酸盐激光玻璃对抛光液pH值具有较强的选择性,在微酸性和中性条件下磷酸盐激光玻璃具有较高的抛光效率,在抛光液中添加pH值调节添加剂会保持抛光环境的酸碱性从而影响抛光效率和抛光质量.通过对pH值和抛光剂浓度的控制获得了均方根(RMS)优于0.6 nm的磷酸盐激光玻璃的超光滑表面.
Embarked from the component and structure of phosphate laser glass,its chemical-mechanical polishing（CMP） mechanism is analyzed.Through experiment,it is demonstrated that the phosphate laser glass has strong selectivity to polishing solution pH value and has high polishing efficiency under slight acidic or neutral condition.By adding pH value adjustment additive in the polishing slurry,the acidity of polishing environment is maintained,as well as the polishing efficiency and polishing quality.An ultra smooth surface of phosphate laser glass with root-mean-square（RMS） 0.6 nm is obtained,through controlling the pH value and density of polishing solution.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2007年第8期1151-1154,共4页
Chinese Journal of Lasers
关键词
材料
激光玻璃
光学加工
抛光液
materials
laser glass
optical processing
polishing slurry
