摘要
采用激光分子束外延(LMBE)方法在蓝宝石(0001)面生长了高质量的Mg0.2Zn0.8O薄膜,并对薄膜在空气中900℃进行了1h的退火处理,然后采用剥离方法在薄膜表面制作了Al叉指电极,制备出MSM型Mg0.2Zn0.8O光电导紫外探测器.对响应时间的测试表明,探测器的上升时间仅为14.3ns,下降时间为6.5μs.
Mg0.2Zn0.8O films were deposited on the c-plane of sapphire by LMBE with two different structures. The films were all annealed in air at 900℃ for lh. Then interdigital Al electrodes were evaporated on the films using the standard liftoff technique. A Mg0.2 Zn0.8O ultraviolet photodetector was obtained,with a fast rise time of 14.3ns and fall time of 6.5μs.
基金
教育部博士点基金(批准号:20030698008)
河南省杰出人才创新基金(批准号:0421001500)资助项目~~
