摘要
介绍了一种基于机电耦合原理的新型冲击加速度MEMS开关.此开关的阈值开关点可以通过偏置电压的改变进行调节设置,同时具有自锁定功能.文中分析了这种开关的准静态加速度静力学平衡条件和在阶跃冲击加速度输入情况下的响应特性,并通过CoventorWare软件模拟,得到悬臂梁型开关在各种加速度输入信号（阶跃、脉冲和半正弦）情况下的瞬态响应过程.开关的实际阈值范围为1000-5000g,响应速度小于60μs.采用MEMS技术制造开关,并通过冲击加速度测试验证了设计结果.
Based on the electro-mechanical coupling principle,a shocking-acceleration switch with a threshold adjusting function is presented. The threshold acceleration is set by adjusting the bias voltage. Based on a theoretical analysis for an inertial step-signal, the transient response of the switch in terms of half-sinusoidal,pulsed, and stepped shocking acceleration is simulated using Coventor-Ware. The threshold of the switches ranges from 1000g to 5000g, and the response time is less than 60μs. A fabricated micro-switch array has been tested, resulting in satisfactory switching capability under shocking acceleration,which agrees well with the design.
基金
国家自然科学基金资助项目(批准号:60376038)~~
关键词
MEMS
冲击加速度开关
开关点电可调节
锁定
机电耦合
MEMS
shocking-acceleration switch
threshold adjusting function
latching function
electro-mechanical cou pling principle
