高精度超声波微压差测量仪设计

Design of High Precision System of Slight Pressure Difference Measurement Using Ultrasonic

微压差和微压力的高精度测量是一个难点。文中提出了一种采用U型管微压计原理、结构简单、可靠性高、成本低、测量精度大大提高的新型微压计,即高精度超声波微压差测量仪,介绍了超声波进行微小压力测量的原理,以及部分硬件结构设计和软件设计。该测量仪测量分辨率可达0.024 mmH2O,在科研、加工和生产等领域具有广泛的应用前景。

High precision system of slight pressure difference measurement has always to be a difficulty. To resolve all the shortcomings of prior methods, we proposed a new kind of slight pressure meter that not only has the advantage of U-shaped tube meter but also can reach higher precision. The principle of how the ultrasonic is employed to measure slight pressure difference is expatiated. The hardware architecture and the software design are also discussed. The measuring resolvability can obtain as high as 0.024 mmH2O.