两种复合涂层性能的对比研究

Research on Comparison of the Function of Two Different Compound Coatings

利用磁控溅射离子镀在试件上先镀一层铝镀层,再真空气相化学沉积一层Parylene(聚对二甲苯)聚合物,与在试件上先真空气相化学沉积一层Parylene聚合物,再磁控溅射离子镀一层铝镀层,两种方法制备出铝加Pary-lene和Parylene加铝的两种复合涂层。本文对这两种复合涂层划痕、磨损实验进行了研究,并运用EDX、SEM形貌等方法进行了复合涂层特性对比分析。得出铝加Parylen和Parylene加铝复合涂层都有低的透湿性,但前种复合涂层较后种复合涂层有较强的防腐、耐磨性和自润滑性能。

There are tow methods of making compound coatings, which are Parylene added to aluminium and Parylene added to aluminium. One is plating on sample by ion conrail in magnetron sputtering which leads to a aluminium plating and aggregating a layer of Parylene polymer by vacuum quantum chemistry. The other is aggregating a layer of Parylene polymer by vacuum quantum chemistry and plating on sample by ion control in magnetron sputtering which leads to a alu- minium plating. This article introduced the research on nick and abrasion of the two compound coatings and the analysis of the companson with two compourid coating＇s traits by the means as EDX, SEM etc. The two compound coatings, they are, Parylene added to aluminium and Parylene added to aluminium got by the ways mentioned above have low pelraeability, but the former is more antiseptic, wearable and lubricant compared to the later.