摘要
利用中子嬗变硅材料和离子注入、氮化硅钝化工艺制成了中子嬗变硅全桥应变计。介绍了其工作原理、参数设计及实验结果．
Using neutron irradiation-Si material and ion implatation, Si3N4 passvation technology, the whole bradge gauge made by neutron irradiation-Si is made. Its principle, parameters design and experiment results are introduced.
出处
《传感器技术》
CSCD
1997年第4期51-54,共4页
Journal of Transducer Technology
关键词
中子嬗变
应变计
硅
Neutron irradiation Gauge
