1Didie Stievenard,Bernard Legrand.Silocon surface nano-oxidation using scanning probe microscopy[J].Progress in Surface Science,2006,81(2-3):112-140.
2Tegens,Kracke B.Surface modification with a scanning force microscope[J].Rev.Sci.Instrum.,1997,68:1458-1460.
3Lee J M,Won Hyuk Jin,Dac Eun Kin.Application of single asperity abrasion process for surface micro-machining[J].Wear,2001,251(1-12):1133-1143.
4Marmin H J,Chiangs,Birk H.Gold deposition from a scanning tunneling microscope tip[J].Phys.,1996,69(4):433.
5Cruchon-Dupeyrat S,Porthun S,Liu G Y.Nanofabrication using computer-assisted design and automated vector-scanning probelithog raphy[J].Applied Surface Science,2001,175-176:636-642.
6Song Jiaqing,Liu Zhongfan,Li Chunzong.SPM-based nano fabrication using a synchronization technique[J].Applied Physics A,1998,66(4):1247-1251.
7Zhou Hualan,Li Zhuang,Wu Aiguo.The influence of tip performance on scanning probe lithography[J].Applied Surface Science,2004,221(1-4):402-407.
8Kim Y S,Na K H,Choi S O,et al.Atomic force microscopy-based nano-lithography for nano-patterning:a molecular dynamics study[J].Journal of Materials Processing Technology,2004,155-156:1847-1854.
9Cheng K,Luo X,Ward R,et al.Modeling and simulation of the tool wear in nanometric cutting[J].Wear,2003,255(7-12):1427-1432.
10Rentsh R.Influence of crystal orientation on the nanometric cutting precess[C].Proceeding of the 1st International Euspen Conference.Bremen,1999:250-253.
