基于三维微光机电系统光开关的研究

The Research of Optical Switch Based on 3-D MOEMS

主要对基于三维微光机电系统(MEMS)的光开关结构进行研究,分析一种新型结构紧凑、高可靠性、大容量的光开关结构,并与常规结构的三维微光机电系统的光开关进行对比,在保证设计参数不变的情况下,保证系统全连接的情况下,可以减少微镜的最大偏转角,从而实现快速的光路切换,并且采用静电梳状微致动器能进一步降低工作电压,实现低功耗和快速的交叉连接,并对系统设计需注意的事项进行分析。

This paper mainly discusses the structure of compact and stable optical crossonnect three-dimension micro-electromechanical systems （3-D MEMS） switches that are a key technology in recent photonic network, Compared with the structure of traditional 3-D MEMS optical switch, it has small MEMS tilt angle so as to complete last switch, large input/output ports, and if the novel micro comb-driven actuator is adopted, it can complete low power consumption and fast cross-connect, at last the notice of some aspects is analyzed with the optical switch design. This paper firstly introduces the structure and principle of the traditional 3-D MEMS, and then describes the structure and principle of the novel 3-D MEMS optical switch.