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钛酸锶钡铁电薄膜的制备与性能优化研究

Status of Research on the Preparation and the Properties Optimization of Ba_xSr_(1-x)TiO_3 Ferroelectric Thin Films
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摘要 综述了目前钛酸锶钡(BST)铁电薄膜最为常用的4种制备工艺:磁控溅射法(Magnetron Sputtering)、脉冲激光沉积法(PLD)、溶胶-凝胶法(Sol-gel)、金属有机物化学气相沉积法(MOCVD)。并介绍了在优化BST铁电薄膜性能方面所作的工作和取得的成果。 Four kinds of preparation technologies of barium strontium titanate （BST） ferroelectric thin film are reviewed, including magnetron sputtering, pulsed laser deposition （PLD）, sol- gel method and metallorganics chemical vapor deposition method （MOCVD）. The studies and achievements in optimizing the properties of BST ferroelectric thin film are also introduced.
作者 王波 杨传仁 陈宏伟 张继华 余桉 张瑞婷
机构地区 电子科技大学电子薄膜与集成器件国家重点实验室
出处 《绝缘材料》 CAS 2007年第4期24-28,共5页 Insulating Materials
基金 国家973项目资助(Z201)
关键词 钛酸锶钡(BST) 铁电薄膜 制备工艺 性能优化 barium strontium titanate （BST） ferroelectric thin film preparation technologies properties optimization
分类号 TM22 [一般工业技术—材料科学与工程]
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参考文献30

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二级参考文献11

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绝缘材料
2007年 第4期

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