高加速度超精密激光外差干涉测量模型

High acceleration ultra-precision measurement model in laser heterodyne interferometry

为了精确地描述激光外差干涉在高加速度超精密测量中加速度对位移测量精度的影响机理与规律,建立了高加速度超精密激光外差干涉位移测量模型。通过分析测量棱镜三维运动对多普勒频移的影响,推导出高加速度激光外差干涉位移测量模型。理论分析和仿真实验表明,当测量加速度为9m/s2,匀加速运行的位移为500mm时,由于加速度变化引起的相对论性效应对测量精度的影响为5nm。高加速度超精密激光外差干涉位移测量模型的建立,可提高激光外差干涉在高加速度超精密测量中的测量精度,为激光外差干涉在高速和超高速测量领域的应用提供了理论依据。

In order to describe the influence of acceleration on the displacement measurement accuracy of the laser heterodyne interferometry in high acceleration ultra-precision measurement, a high acceleration ultra-precision measurement model is proposed, Based on analysis of the impact on the Doppler shift caused by the measurement prism three-dimensional motion, the model is researched and deduced in detail, With this model, theory analysis and simulation results show that when the measuring acceleration is 9m/s^2 and the displacement is 500mm, the influence of relativistic effect on measurement accuracy caused by variable acceleration is about 5nm. With the model established, the accuracy of the laser heterodyne interferometry can be improved in high acceleration ultra-precision measurement, which provides a theoretical foundation for the laser heterodyne interferometry in high-speed and ultra-high-speed measurement.