表面三维形貌非接触测量的现状

The Present Situation of the Noncontact Three Dimensional Measurement of Surface Topography

文章首先指出表面形貌对机械、电子和光学系统的使用性能影响很大,尤其在现代产品生产中,精确可靠地测量表面形貌,日益成为控制和改进加工表面质量的必要条件。作者在对表面形貌的接触式测量方法进行了简要的评介之后,着重就非接触式表面形貌测量方法中主要应用的相移干涉显微镜和扫描隧道显微镜的测量原理和仪器结构作了介绍。

This paper indicates that the surface topography plays an important role in the operational performances of the mechanicals electronic and optical systems especially during producing the modern products, exactly measuring surface topography has become an essential requrement for controlling and improving the quality of processing surface. After evaluating the contact measurement of surface topography, the misphasin;; interference microscope and scanning turneling microscopy's measuring principle and structures were introduced. These instruments principally were used for noncontact measurement of surface topography. The author considered that the double light beam interference microscope had the advantages of easy to operate and measuring rapidity, therefore it was a noncontact precision tester for observing microtopography of surface; the scanning turaeling microscope was a new generation mic-rotester with very high-resolution(its vertical and horizontal resolutions were 0.1 A and 5A respectively), it was developed subsequent to optical microscope and electron microscope, so it has become one of the most effective tool for researching three dimensional structure of the solid surface topography.